c:\users\f208-pc1\desktop\karl's dokumente\xps\a-2021c\2108\2108_02_04_06_b4.vms
4.REG
	Characteristic Energy eV	1486.6	Acquisition Time s	1.2
KE_4.REG	BE_4.REG	CPS_4.REG	Background_4.REG
946.436	540.164	0.0708913	0.0708913
946.486	540.114	0.0745941	0.0745941
946.536	540.064	0.0762889	0.0762889
946.586	540.014	0.0733973	0.0733973
946.636	539.964	0.068823	0.068823
946.686	539.914	0.0712929	0.0712929
946.736	539.864	0.0731001	0.0731001
946.786	539.814	0.0718953	0.0718953
946.836	539.764	0.0686021	0.0686021
946.886	539.714	0.0724254	0.0724254
946.936	539.664	0.0734174	0.0734174
946.986	539.614	0.0644897	0.0644897
947.036	539.564	0.0580359	0.0580359
947.086	539.514	0.0627949	0.0627949
947.136	539.464	0.073815	0.073815
947.186	539.414	0.0750238	0.0750238
947.236	539.364	0.0650038	0.0650038
947.286	539.314	0.0593612	0.0593612
947.336	539.264	0.0644335	0.0644335
947.386	539.214	0.0691563	0.0691563
947.436	539.164	0.0704415	0.0704415
947.486	539.114	0.0644696	0.0644696
947.536	539.064	0.0636343	0.0636343
947.586	539.014	0.0607347	0.0607347
947.636	538.964	0.0661483	0.0661483
947.686	538.914	0.0636022	0.0636022
947.736	538.864	0.0625339	0.0625339
947.786	538.814	0.056056	0.056056
947.836	538.764	0.0571604	0.0571604
947.886	538.714	0.0646584	0.0646584
947.936	538.664	0.0679716	0.0679716
947.986	538.614	0.0616865	0.0616865
948.036	538.564	0.0648873	0.0648873
948.086	538.514	0.0716102	0.0716102
948.136	538.464	0.0693491	0.0693491
948.186	538.414	0.0568753	0.0568753
948.236	538.364	0.0528753	0.0528753
948.286	538.314	0.0541564	0.0541564
948.336	538.264	0.0568833	0.0568833
948.386	538.214	0.0586584	0.0586584
948.436	538.164	0.0610921	0.0610921
948.486	538.114	0.0601644	0.0601644
948.536	538.064	0.0574174	0.0574174
948.586	538.014	0.0608672	0.0608672
948.636	537.964	0.0723772	0.0723772
948.686	537.914	0.0719596	0.0719596
948.736	537.864	0.0724656	0.0724656
948.786	537.814	0.0681001	0.0681001
948.836	537.764	0.0698511	0.0698511
948.886	537.714	0.0655981	0.0655981
948.936	537.664	0.0668632	0.0668632
948.986	537.614	0.064305	0.064305
949.036	537.564	0.0648552	0.0648552
949.086	537.514	0.0686825	0.0686825
949.136	537.464	0.070819	0.070819
949.186	537.414	0.0728913	0.0728913
949.236	537.364	0.0724254	0.0724254
949.286	537.314	0.0753411	0.0753411
949.336	537.264	0.0796222	0.0796222
949.386	537.214	0.0802366	0.0802366
949.436	537.164	0.0737989	0.0737989
949.486	537.114	0.0703491	0.0703491
949.536	537.064	0.0710921	0.0710921
949.586	537.014	0.0757909	0.0757909
949.636	536.964	0.0838872	0.0838872
949.686	536.914	0.0876703	0.0876703
949.736	536.864	0.0901884	0.0901884
949.786	536.814	0.092851	0.092851
949.836	536.764	0.0975819	0.0975819
949.886	536.714	0.101164	0.101164
949.936	536.664	0.10116	0.10116
949.986	536.614	0.0952165	0.0952165
950.036	536.564	0.0922366	0.0922366
950.086	536.514	0.101148	0.101148
950.136	536.464	0.107638	0.107638
950.186	536.414	0.109385	0.109385
950.236	536.364	0.111084	0.111084
950.286	536.314	0.111907	0.111907
950.336	536.264	0.112598	0.112598
950.386	536.214	0.11655	0.11655
950.436	536.164	0.120755	0.120755
950.486	536.114	0.123855	0.123855
950.536	536.064	0.127481	0.127481
950.586	536.014	0.12961	0.12961
950.636	535.964	0.124224	0.124224
950.686	535.914	0.116923	0.116923
950.736	535.864	0.115863	0.115863
950.786	535.814	0.111996	0.111996
950.836	535.764	0.115534	0.115534
950.886	535.714	0.123883	0.123883
950.936	535.664	0.129353	0.129353
950.986	535.614	0.118196	0.118196
951.036	535.564	0.10973	0.10973
951.086	535.514	0.112052	0.112052
951.136	535.464	0.116927	0.116927
951.186	535.414	0.116795	0.116795
951.236	535.364	0.113546	0.113546
951.286	535.314	0.106646	0.106646
951.336	535.264	0.0989514	0.0989514
951.386	535.214	0.0941241	0.0941241
951.436	535.164	0.0986261	0.0986261
951.486	535.114	0.102992	0.102992
951.536	535.064	0.103172	0.103172
951.586	535.014	0.100104	0.100104
951.636	534.964	0.0938751	0.0938751
951.686	534.914	0.0958028	0.0958028
951.736	534.864	0.0978831	0.0978831
951.786	534.814	0.0947948	0.0947948
951.836	534.764	0.0826021	0.0826021
951.886	534.714	0.0875338	0.0875338
951.936	534.664	0.0906061	0.0906061
951.986	534.614	0.0856543	0.0856543
952.036	534.564	0.0834776	0.0834776
952.086	534.514	0.0903169	0.0903169
952.136	534.464	0.0899434	0.0899434
952.186	534.414	0.0844655	0.0844655
952.236	534.364	0.0836784	0.0836784
952.286	534.314	0.0858189	0.0858189
952.336	534.264	0.0839675	0.0839675
952.386	534.214	0.0843169	0.0843169
952.436	534.164	0.0823892	0.0823892
952.486	534.114	0.0894374	0.0894374
952.536	534.064	0.0970117	0.0970117
952.586	534.014	0.0978711	0.0978711
952.636	533.964	0.092345	0.092345
952.686	533.914	0.0929193	0.0929193
952.736	533.864	0.0975819	0.0975819
952.786	533.814	0.0980719	0.0980719
952.836	533.764	0.100815	0.100815
952.886	533.714	0.0992888	0.0992888
952.936	533.664	0.0996422	0.0996422
952.986	533.614	0.102285	0.102285
953.036	533.564	0.110008	0.110008
953.086	533.514	0.104044	0.104044
953.136	533.464	0.103871	0.103871
953.186	533.414	0.108204	0.108204
953.236	533.364	0.113887	0.113887
953.286	533.314	0.109072	0.109072
953.336	533.264	0.10453	0.10453
953.386	533.214	0.104425	0.104425
953.436	533.164	0.107963	0.107963
953.486	533.114	0.11169	0.11169
953.536	533.064	0.111602	0.111602
953.586	533.014	0.107522	0.107522
953.636	532.964	0.108365	0.108365
953.686	532.914	0.108281	0.108281
953.736	532.864	0.106855	0.106855
953.786	532.814	0.109923	0.109923
953.836	532.764	0.113506	0.113506
953.886	532.714	0.114791	0.114791
953.936	532.664	0.112996	0.112996
953.986	532.614	0.112983	0.112983
954.036	532.564	0.106526	0.106526
954.086	532.514	0.104847	0.104847
954.136	532.464	0.110767	0.110767
954.186	532.414	0.113996	0.113996
954.236	532.364	0.116289	0.116289
954.286	532.314	0.116457	0.116457
954.336	532.264	0.118742	0.118742
954.386	532.214	0.115445	0.115445
954.436	532.164	0.117827	0.117827
954.486	532.114	0.122236	0.122236
954.536	532.064	0.124755	0.124755
954.586	532.014	0.126983	0.126983
954.636	531.964	0.123212	0.123212
954.686	531.914	0.124044	0.124044
954.736	531.864	0.125132	0.125132
954.786	531.814	0.135293	0.135293
954.836	531.764	0.135457	0.135457
954.886	531.714	0.143831	0.143831
954.936	531.664	0.152228	0.152228
954.986	531.614	0.158618	0.158618
955.036	531.564	0.153116	0.153116
955.086	531.514	0.157871	0.157871
955.136	531.464	0.164963	0.164963
955.186	531.414	0.178192	0.178192
955.236	531.364	0.186248	0.186248
955.286	531.314	0.197425	0.197425
955.336	531.264	0.204999	0.204999
955.386	531.214	0.221308	0.221308
955.436	531.164	0.237047	0.237047
955.486	531.114	0.252646	0.252646
955.536	531.064	0.26075	0.26075
955.586	531.014	0.27481	0.27481
955.636	530.964	0.290392	0.290392
955.686	530.914	0.317272	0.317272
955.736	530.864	0.348999	0.348999
955.786	530.814	0.386388	0.386388
955.836	530.764	0.414834	0.414834
955.886	530.714	0.449038	0.449038
955.936	530.664	0.494657	0.494657
955.986	530.614	0.537805	0.537805
956.036	530.564	0.579648	0.579648
956.086	530.514	0.615339	0.615339
956.136	530.464	0.66913	0.66913
956.186	530.414	0.716118	0.716118
956.236	530.364	0.768121	0.768121
956.286	530.314	0.802414	0.802414
956.336	530.264	0.847816	0.847816
956.386	530.214	0.897759	0.897759
956.436	530.164	0.933799	0.933799
956.486	530.114	0.949518	0.949518
956.536	530.064	0.971301	0.971301
956.586	530.014	0.998506	0.998506
956.636	529.964	1	1
956.686	529.914	0.998305	0.998305
956.736	529.864	0.97496	0.97496
956.786	529.814	0.953325	0.953325
956.836	529.764	0.912651	0.912651
956.886	529.714	0.887073	0.887073
956.936	529.664	0.832635	0.832635
956.986	529.614	0.783929	0.783929
957.036	529.564	0.727491	0.727491
957.086	529.514	0.672134	0.672134
957.136	529.464	0.619126	0.619126
957.186	529.414	0.559962	0.559962
957.236	529.364	0.506002	0.506002
957.286	529.314	0.445548	0.445548
957.336	529.264	0.398472	0.398472
957.386	529.214	0.343412	0.343412
957.436	529.164	0.302087	0.302087
957.486	529.114	0.264473	0.264473
957.536	529.064	0.232087	0.232087
957.586	529.014	0.203855	0.203855
957.636	528.964	0.176654	0.176654
957.686	528.914	0.148831	0.148831
957.736	528.864	0.121108	0.121108
957.786	528.814	0.106739	0.106739
957.836	528.764	0.0972607	0.0972607
957.886	528.714	0.0924896	0.0924896
957.936	528.664	0.0826463	0.0826463
957.986	528.614	0.0680238	0.0680238
958.036	528.564	0.0577267	0.0577267
958.086	528.514	0.0535901	0.0535901
958.136	528.464	0.0525299	0.0525299
958.186	528.414	0.0437026	0.0437026
958.236	528.364	0.0393533	0.0393533
958.286	528.314	0.0372569	0.0372569
958.336	528.264	0.038293	0.038293
958.386	528.214	0.0361444	0.0361444
958.436	528.164	0.031783	0.031783
958.486	528.114	0.0269959	0.0269959
958.536	528.064	0.0243292	0.0243292
958.586	528.014	0.0285662	0.0285662
958.636	527.964	0.0248071	0.0248071
958.686	527.914	0.024779	0.024779
958.736	527.864	0.0265822	0.0265822
958.786	527.814	0.0301083	0.0301083
958.836	527.764	0.019028	0.019028
958.886	527.714	0.0153534	0.0153534
958.936	527.664	0.0138353	0.0138353
958.986	527.614	0.0197469	0.0197469
959.036	527.564	0.0206304	0.0206304
959.086	527.514	0.0206626	0.0206626
959.136	527.464	0.0154417	0.0154417
959.186	527.414	0.0125823	0.0125823
959.236	527.364	0.0129919	0.0129919
959.286	527.314	0.0138192	0.0138192
959.336	527.264	0.012767	0.012767
959.386	527.214	0.00999996	0.00999996
959.436	527.164	0.00831322	0.00831322
959.486	527.114	0.0069317	0.0069317
959.536	527.064	0.00827306	0.00827306
959.586	527.014	0.0121244	0.0121244
959.636	526.964	0.0111927	0.0111927
959.686	526.914	0.0116947	0.0116947
959.736	526.864	0.0120963	0.0120963
959.786	526.814	0.0161606	0.0161606
959.836	526.764	0.0149598	0.0149598
959.886	526.714	0.00985538	0.00985538
959.936	526.664	0.00459034	0.00459034
959.986	526.614	0.00389557	0.00389557
960.036	526.564	0.009008	0.009008
960.086	526.514	0.00948591	0.00948591
960.136	526.464	0.0119518	0.0119518
960.186	526.414	0.01451	0.01451
960.236	526.364	0.0126706	0.0126706
960.286	526.314	0.00817667	0.00817667
960.336	526.264	0.00559436	0.00559436
960.386	526.214	0.00706423	0.00706423
960.436	526.164	0.00767467	0.00767467
960.486	526.114	0.0115743	0.0115743
960.536	526.064	0.0104136	0.0104136
960.586	526.014	0.005506	0.005506
960.636	525.964	0.00539757	0.00539757
960.686	525.914	0.00840157	0.00840157
960.736	525.864	0.00785539	0.00785539
960.786	525.814	0.00613251	0.00613251
960.836	525.764	0.00901201	0.00901201
960.886	525.714	0.00969072	0.00969072
960.936	525.664	0.0099357	0.0099357
960.986	525.614	0.0059558	0.0059558
961.036	525.564	0.00943771	0.00943771
961.086	525.514	0.0123172	0.0123172
961.136	525.464	0.0138634	0.0138634
961.186	525.414	0.00826904	0.00826904
961.236	525.364	0.010249	0.010249
961.286	525.314	0.0118393	0.0118393
961.336	525.264	0.00814053	0.00814053
961.386	525.214	0.00792366	0.00792366
961.436	525.164	0.0075582	0.0075582
961.486	525.114	0.00690359	0.00690359
961.536	525.064	0.00273091	0.00273091
961.586	525.014	0.00206425	0.00206425
961.636	524.964	0.00146586	0.00146586
961.686	524.914	0.00532528	0.00532528
961.736	524.864	0.0103574	0.0103574
961.786	524.814	0.0125662	0.0125662
961.836	524.764	0.0104859	0.0104859
961.886	524.714	0.00885137	0.00885137
961.936	524.664	0.00748591	0.00748591
961.986	524.614	0.00793973	0.00793973
962.036	524.564	0.00319276	0.00319276
962.086	524.514	0.00149799	0.00149799
962.136	524.464	0.00429316	0.00429316
962.186	524.414	0.00914856	0.00914856
962.236	524.364	0.00911643	0.00911643
962.286	524.314	0.00904012	0.00904012
962.336	524.264	0.00972285	0.00972285
962.386	524.214	0.00737748	0.00737748
962.436	524.164	0.0073333	0.0073333
962.486	524.114	0.0109116	0.0109116
962.536	524.064	0.0142289	0.0142289
962.586	524.014	0.0109678	0.0109678
962.636	523.964	0.00612046	0.00612046
962.686	523.914	0.00276304	0.00276304
962.736	523.864	0.0120763	0.0120763
962.786	523.814	0.01551	0.01551
962.836	523.764	0.0108714	0.0108714
962.886	523.714	0.00378312	0.00378312
962.936	523.664	0.00344577	0.00344577
962.986	523.614	0.00160642	0.00160642
963.036	523.564	0	0
963.086	523.514	0.0010522	0.0010522
963.136	523.464	0.00167068	0.00167068
963.186	523.414	0.00577106	0.00577106
963.236	523.364	0.0121204	0.0121204
963.286	523.314	0.0112971	0.0112971
963.336	523.264	0.00537347	0.00537347
963.386	523.214	0.00271485	0.00271485
963.436	523.164	0.00552608	0.00552608
963.486	523.114	0.0103212	0.0103212
963.536	523.064	0.0114297	0.0114297
963.586	523.014	0.00794374	0.00794374
963.636	522.964	0.00473894	0.00473894
963.686	522.914	0.00616463	0.00616463
963.736	522.864	0.00925699	0.00925699
963.786	522.814	0.00714857	0.00714857
963.836	522.764	0.00761041	0.00761041
963.886	522.714	0.00557829	0.00557829
963.936	522.664	0.00851001	0.00851001
963.986	522.614	0.00951803	0.00951803
964.036	522.564	0.0092088	0.0092088
964.086	522.514	0.00504817	0.00504817
964.136	522.464	0.00785941	0.00785941
964.186	522.414	0.0119919	0.0119919
964.236	522.364	0.0108755	0.0108755
964.286	522.314	0.00561845	0.00561845
964.336	522.264	0.00860238	0.00860238
964.386	522.214	0.0113333	0.0113333
964.436	522.164	0.0110722	0.0110722