c:\users\f208-pc1\desktop\karl's dokumente\xps\a-2021c\2108\2108_19_18_b3.vms
4.REG
	Characteristic Energy eV	1486.6	Acquisition Time s	1.2
KE_4.REG	BE_4.REG	CPS_4.REG	Background_4.REG
946.359	540.241	0.0641159	0.0641159
946.409	540.191	0.0683181	0.0683181
946.459	540.141	0.0747239	0.0747239
946.509	540.091	0.0723281	0.0723281
946.559	540.041	0.0739424	0.0739424
946.609	539.991	0.0733595	0.0733595
946.659	539.941	0.0734427	0.0734427
946.709	539.891	0.0668383	0.0668383
946.759	539.841	0.0618802	0.0618802
946.809	539.791	0.0632126	0.0632126
946.859	539.741	0.0624952	0.0624952
946.909	539.691	0.0593371	0.0593371
946.959	539.641	0.0555129	0.0555129
947.009	539.591	0.0579919	0.0579919
947.059	539.541	0.0593179	0.0593179
947.109	539.491	0.0608425	0.0608425
947.159	539.441	0.0635137	0.0635137
947.209	539.391	0.0637764	0.0637764
947.259	539.341	0.0664796	0.0664796
947.309	539.291	0.0663259	0.0663259
947.359	539.241	0.0636931	0.0636931
947.409	539.191	0.0531363	0.0531363
947.459	539.141	0.0608553	0.0608553
947.509	539.091	0.0627066	0.0627066
947.559	539.041	0.0691252	0.0691252
947.609	538.991	0.0644426	0.0644426
947.659	538.941	0.0660889	0.0660889
947.709	538.891	0.0617841	0.0617841
947.759	538.841	0.0552054	0.0552054
947.809	538.791	0.0526366	0.0526366
947.859	538.741	0.0514516	0.0514516
947.909	538.691	0.059587	0.059587
947.959	538.641	0.0604838	0.0604838
948.009	538.591	0.0594012	0.0594012
948.059	538.541	0.0614126	0.0614126
948.109	538.491	0.0672675	0.0672675
948.159	538.441	0.0644554	0.0644554
948.209	538.391	0.0591578	0.0591578
948.259	538.341	0.0589976	0.0589976
948.309	538.291	0.0518423	0.0518423
948.359	538.241	0.0520409	0.0520409
948.409	538.191	0.0605158	0.0605158
948.459	538.141	0.0681579	0.0681579
948.509	538.091	0.0664988	0.0664988
948.559	538.041	0.0632895	0.0632895
948.609	537.991	0.0559997	0.0559997
948.659	537.941	0.0465383	0.0465383
948.709	537.891	0.0551862	0.0551862
948.759	537.841	0.0611948	0.0611948
948.809	537.791	0.0588695	0.0588695
948.859	537.741	0.0521946	0.0521946
948.909	537.691	0.0532196	0.0532196
948.959	537.641	0.0577613	0.0577613
949.009	537.591	0.0553207	0.0553207
949.059	537.541	0.0552054	0.0552054
949.109	537.491	0.0514708	0.0514708
949.159	537.441	0.0572552	0.0572552
949.209	537.391	0.0613357	0.0613357
949.259	537.341	0.0641287	0.0641287
949.309	537.291	0.0570054	0.0570054
949.359	537.241	0.049107	0.049107
949.409	537.191	0.0531811	0.0531811
949.459	537.141	0.0562495	0.0562495
949.509	537.091	0.0519768	0.0519768
949.559	537.041	0.0472429	0.0472429
949.609	536.991	0.0539434	0.0539434
949.659	536.941	0.0551541	0.0551541
949.709	536.891	0.0527455	0.0527455
949.759	536.841	0.0499462	0.0499462
949.809	536.791	0.0522971	0.0522971
949.859	536.741	0.0481846	0.0481846
949.909	536.691	0.0487355	0.0487355
949.959	536.641	0.0485946	0.0485946
950.009	536.591	0.051695	0.051695
950.059	536.541	0.0535014	0.0535014
950.109	536.491	0.0526943	0.0526943
950.159	536.441	0.047134	0.047134
950.209	536.391	0.0466024	0.0466024
950.259	536.341	0.0456671	0.0456671
950.309	536.291	0.0522331	0.0522331
950.359	536.241	0.0554488	0.0554488
950.409	536.191	0.0658326	0.0658326
950.459	536.141	0.0591706	0.0591706
950.509	536.091	0.0587414	0.0587414
950.559	536.041	0.0561214	0.0561214
950.609	535.991	0.0574794	0.0574794
950.659	535.941	0.0543982	0.0543982
950.709	535.891	0.054552	0.054552
950.759	535.841	0.0524893	0.0524893
950.809	535.791	0.0541036	0.0541036
950.859	535.741	0.0559228	0.0559228
950.909	535.691	0.058562	0.058562
950.959	535.641	0.0581969	0.0581969
951.009	535.591	0.0555833	0.0555833
951.059	535.541	0.0590104	0.0590104
951.109	535.491	0.0575243	0.0575243
951.159	535.441	0.0557114	0.0557114
951.209	535.391	0.0566851	0.0566851
951.259	535.341	0.0621365	0.0621365
951.309	535.291	0.0591321	0.0591321
951.359	535.241	0.0626617	0.0626617
951.409	535.191	0.0699964	0.0699964
951.459	535.141	0.0649614	0.0649614
951.509	535.091	0.0557883	0.0557883
951.559	535.041	0.0569862	0.0569862
951.609	534.991	0.06557	0.06557
951.659	534.941	0.0644426	0.0644426
951.709	534.891	0.0619763	0.0619763
951.759	534.841	0.0637571	0.0637571
951.809	534.791	0.0680298	0.0680298
951.859	534.741	0.0586005	0.0586005
951.909	534.691	0.060945	0.060945
951.959	534.641	0.0679017	0.0679017
952.009	534.591	0.0708868	0.0708868
952.059	534.541	0.0644938	0.0644938
952.109	534.491	0.0683309	0.0683309
952.159	534.441	0.0715082	0.0715082
952.209	534.391	0.0692405	0.0692405
952.259	534.341	0.0662042	0.0662042
952.309	534.291	0.068696	0.068696
952.359	534.241	0.0639813	0.0639813
952.409	534.191	0.0639878	0.0639878
952.459	534.141	0.0692597	0.0692597
952.509	534.091	0.0830835	0.0830835
952.559	534.041	0.0820842	0.0820842
952.609	533.991	0.0749033	0.0749033
952.659	533.941	0.0666526	0.0666526
952.709	533.891	0.0693366	0.0693366
952.759	533.841	0.0797717	0.0797717
952.809	533.791	0.0849988	0.0849988
952.859	533.741	0.077914	0.077914
952.909	533.691	0.0740257	0.0740257
952.959	533.641	0.0732442	0.0732442
953.009	533.591	0.0733467	0.0733467
953.059	533.541	0.072232	0.072232
953.109	533.491	0.0738079	0.0738079
953.159	533.441	0.0794322	0.0794322
953.209	533.391	0.0762677	0.0762677
953.259	533.341	0.0741986	0.0741986
953.309	533.291	0.0687793	0.0687793
953.359	533.241	0.0715466	0.0715466
953.409	533.191	0.0745766	0.0745766
953.459	533.141	0.0774464	0.0774464
953.509	533.091	0.0799895	0.0799895
953.559	533.041	0.082571	0.082571
953.609	532.991	0.0837689	0.0837689
953.659	532.941	0.0787404	0.0787404
953.709	532.891	0.0716875	0.0716875
953.759	532.841	0.0736093	0.0736093
953.809	532.791	0.0791888	0.0791888
953.859	532.741	0.0871832	0.0871832
953.909	532.691	0.0848964	0.0848964
953.959	532.641	0.0830259	0.0830259
954.009	532.591	0.0802457	0.0802457
954.059	532.541	0.0854408	0.0854408
954.109	532.491	0.0874843	0.0874843
954.159	532.441	0.0888423	0.0888423
954.209	532.391	0.0914751	0.0914751
954.259	532.341	0.100475	0.100475
954.309	532.291	0.10077	0.10077
954.359	532.241	0.0979258	0.0979258
954.409	532.191	0.0974261	0.0974261
954.459	532.141	0.103608	0.103608
954.509	532.091	0.0981372	0.0981372
954.559	532.041	0.10052	0.10052
954.609	531.991	0.107195	0.107195
954.659	531.941	0.11371	0.11371
954.709	531.891	0.117592	0.117592
954.759	531.841	0.117752	0.117752
954.809	531.791	0.11861	0.11861
954.859	531.741	0.12066	0.12066
954.909	531.691	0.122774	0.122774
954.959	531.641	0.127015	0.127015
955.009	531.591	0.133267	0.133267
955.059	531.541	0.135349	0.135349
955.109	531.491	0.132344	0.132344
955.159	531.441	0.140448	0.140448
955.209	531.391	0.151113	0.151113
955.259	531.341	0.152164	0.152164
955.309	531.291	0.153471	0.153471
955.359	531.241	0.158704	0.158704
955.409	531.191	0.165174	0.165174
955.459	531.141	0.164284	0.164284
955.509	531.091	0.165687	0.165687
955.559	531.041	0.180721	0.180721
955.609	530.991	0.197286	0.197286
955.659	530.941	0.214819	0.214819
955.709	530.891	0.223019	0.223019
955.759	530.841	0.224466	0.224466
955.809	530.791	0.227452	0.227452
955.859	530.741	0.253197	0.253197
955.909	530.691	0.289389	0.289389
955.959	530.641	0.307114	0.307114
956.009	530.591	0.336331	0.336331
956.059	530.541	0.362896	0.362896
956.109	530.491	0.410575	0.410575
956.159	530.441	0.448561	0.448561
956.209	530.391	0.502517	0.502517
956.259	530.341	0.540229	0.540229
956.309	530.291	0.593474	0.593474
956.359	530.241	0.637161	0.637161
956.409	530.191	0.681938	0.681938
956.459	530.141	0.734383	0.734383
956.509	530.091	0.791542	0.791542
956.559	530.041	0.832033	0.832033
956.609	529.991	0.877277	0.877277
956.659	529.941	0.926275	0.926275
956.709	529.891	0.96988	0.96988
956.759	529.841	0.981839	0.981839
956.809	529.791	0.991134	0.991134
956.859	529.741	0.996848	0.996848
956.909	529.691	1	1
956.959	529.641	0.978066	0.978066
957.009	529.591	0.946121	0.946121
957.059	529.541	0.913931	0.913931
957.109	529.491	0.872057	0.872057
957.159	529.441	0.822732	0.822732
957.209	529.391	0.772356	0.772356
957.259	529.341	0.719976	0.719976
957.309	529.291	0.662317	0.662317
957.359	529.241	0.603038	0.603038
957.409	529.191	0.534591	0.534591
957.459	529.141	0.471167	0.471167
957.509	529.091	0.404637	0.404637
957.559	529.041	0.359847	0.359847
957.609	528.991	0.32252	0.32252
957.659	528.941	0.287179	0.287179
957.709	528.891	0.23681	0.23681
957.759	528.841	0.195384	0.195384
957.809	528.791	0.165674	0.165674
957.859	528.741	0.145361	0.145361
957.909	528.691	0.127316	0.127316
957.959	528.641	0.113486	0.113486
958.009	528.591	0.0947998	0.0947998
958.059	528.541	0.0758193	0.0758193
958.109	528.491	0.0579727	0.0579727
958.159	528.441	0.0546673	0.0546673
958.209	528.391	0.0514964	0.0514964
958.259	528.341	0.0479732	0.0479732
958.309	528.291	0.0409716	0.0409716
958.359	528.241	0.0371602	0.0371602
958.409	528.191	0.0317729	0.0317729
958.459	528.141	0.0304597	0.0304597
958.509	528.091	0.0282689	0.0282689
958.559	528.041	0.0260909	0.0260909
958.609	527.991	0.0242845	0.0242845
958.659	527.941	0.0232852	0.0232852
958.709	527.891	0.0233941	0.0233941
958.759	527.841	0.0201207	0.0201207
958.809	527.791	0.0160274	0.0160274
958.859	527.741	0.0137021	0.0137021
958.909	527.691	0.0203641	0.0203641
958.959	527.641	0.0281984	0.0281984
959.009	527.591	0.0227599	0.0227599
959.059	527.541	0.0158992	0.0158992
959.109	527.491	0.0118828	0.0118828
959.159	527.441	0.0167897	0.0167897
959.209	527.391	0.0124978	0.0124978
959.259	527.341	0.0148871	0.0148871
959.309	527.291	0.0113447	0.0113447
959.359	527.241	0.0146181	0.0146181
959.409	527.191	0.012786	0.012786
959.459	527.141	0.0208125	0.0208125
959.509	527.091	0.0201335	0.0201335
959.559	527.041	0.022888	0.022888
959.609	526.991	0.0216581	0.0216581
959.659	526.941	0.0198901	0.0198901
959.709	526.891	0.0118187	0.0118187
959.759	526.841	0.0115625	0.0115625
959.809	526.791	0.0110693	0.0110693
959.859	526.741	0.00947421	0.00947421
959.909	526.691	0.0126451	0.0126451
959.959	526.641	0.020268	0.020268
960.009	526.591	0.0218823	0.0218823
960.059	526.541	0.0180836	0.0180836
960.109	526.491	0.0182502	0.0182502
960.159	526.441	0.0130935	0.0130935
960.209	526.391	0.0124785	0.0124785
960.259	526.341	0.0105632	0.0105632
960.309	526.291	0.0185064	0.0185064
960.359	526.241	0.0159697	0.0159697
960.409	526.191	0.0164437	0.0164437
960.459	526.141	0.0161106	0.0161106
960.509	526.091	0.016021	0.016021
960.559	526.041	0.015169	0.015169
960.609	525.991	0.0151241	0.0151241
960.659	525.941	0.0203129	0.0203129
960.709	525.891	0.0128949	0.0128949
960.759	525.841	0.0112999	0.0112999
960.809	525.791	0.0076998	0.0076998
960.859	525.741	0.0159505	0.0159505
960.909	525.691	0.01007	0.01007
960.959	525.641	0.00816742	0.00816742
961.009	525.591	0.00410613	0.00410613
961.059	525.541	0.0148871	0.0148871
961.109	525.491	0.0159249	0.0159249
961.159	525.441	0.014695	0.014695
961.209	525.391	0.00855177	0.00855177
961.259	525.341	0.0069375	0.0069375
961.309	525.291	0.00634817	0.00634817
961.359	525.241	0.00664924	0.00664924
961.409	525.191	0.0118636	0.0118636
961.459	525.141	0.0134202	0.0134202
961.509	525.091	0.0180388	0.0180388
961.559	525.041	0.0215492	0.0215492
961.609	524.991	0.0174238	0.0174238
961.659	524.941	0.0067133	0.0067133
961.709	524.891	0.00134522	0.00134522
961.759	524.841	0.00654675	0.00654675
961.809	524.791	0.00479155	0.00479155
961.859	524.741	0.00445845	0.00445845
961.909	524.691	0.00151177	0.00151177
961.959	524.641	0.0101468	0.0101468
962.009	524.591	0.00934609	0.00934609
962.059	524.541	0.0159121	0.0159121
962.109	524.491	0.00860302	0.00860302
962.159	524.441	0.00751403	0.00751403
962.209	524.391	0.00286981	0.00286981
962.259	524.341	0.00984575	0.00984575
962.309	524.291	0.0118251	0.0118251
962.359	524.241	0.015137	0.015137
962.409	524.191	0.0120429	0.0120429
962.459	524.141	0.00887847	0.00887847
962.509	524.091	0.00859661	0.00859661
962.559	524.041	0.00681579	0.00681579
962.609	523.991	0.00668768	0.00668768
962.659	523.941	0.00487483	0.00487483
962.709	523.891	0.00992262	0.00992262
962.759	523.841	0.00998027	0.00998027
962.809	523.791	0.0124978	0.0124978
962.859	523.741	0.00546417	0.00546417
962.909	523.691	0.00577805	0.00577805
962.959	523.641	0.00325416	0.00325416
963.009	523.591	0.00958951	0.00958951
963.059	523.541	0.00993543	0.00993543
963.109	523.491	0.0168089	0.0168089
963.159	523.441	0.0108194	0.0108194
963.209	523.391	0.00796884	0.00796884
963.259	523.341	0.00205627	0.00205627
963.309	523.291	0.0101532	0.0101532
963.359	523.241	0.0178146	0.0178146
963.409	523.191	0.014522	0.014522
963.459	523.141	0.00809696	0.00809696
963.509	523.091	0.00839803	0.00839803
963.559	523.041	0.0135419	0.0135419
963.609	522.991	0.0110693	0.0110693
963.659	522.941	0.00479796	0.00479796
963.709	522.891	0.00605991	0.00605991
963.759	522.841	0.014554	0.014554
963.809	522.791	0.0108066	0.0108066
963.859	522.741	0	0
963.909	522.691	0.000102493	0.000102493
963.959	522.641	0.00633536	0.00633536
964.009	522.591	0.012344	0.012344
964.059	522.541	0.0093525	0.0093525
964.109	522.491	0.0113255	0.0113255
964.159	522.441	0.00956389	0.00956389
964.209	522.391	0.0157135	0.0157135
964.259	522.341	0.00966638	0.00966638
964.309	522.291	0.00430471	0.00430471
964.359	522.241	0.00100571	0.00100571