c:\users\f208-pc1\desktop\karl's dokumente\xps\a-2021c\2108\2108_19_18_b3.vms
4.REG
	Characteristic Energy eV	1486.6	Acquisition Time s	1.2
KE_4.REG	BE_4.REG	CPS_4.REG	Background_4.REG
946.646	539.954	0.0663335	0.0663335
946.696	539.904	0.0703057	0.0703057
946.746	539.854	0.0697626	0.0697626
946.796	539.804	0.0612256	0.0612256
946.846	539.754	0.0561536	0.0561536
946.896	539.704	0.060746	0.060746
946.946	539.654	0.0631194	0.0631194
946.996	539.604	0.0628272	0.0628272
947.046	539.554	0.0604483	0.0604483
947.096	539.504	0.0598418	0.0598418
947.146	539.454	0.0574877	0.0574877
947.196	539.404	0.0595359	0.0595359
947.246	539.354	0.0638691	0.0638691
947.296	539.304	0.064109	0.064109
947.346	539.254	0.0646823	0.0646823
947.396	539.204	0.0625102	0.0625102
947.446	539.154	0.0619506	0.0619506
947.496	539.104	0.0552136	0.0552136
947.546	539.054	0.0559413	0.0559413
947.596	539.004	0.0552329	0.0552329
947.646	538.954	0.0593815	0.0593815
947.696	538.904	0.0549379	0.0549379
947.746	538.854	0.0563245	0.0563245
947.796	538.804	0.0573389	0.0573389
947.846	538.754	0.062557	0.062557
947.896	538.704	0.0593153	0.0593153
947.946	538.654	0.0561508	0.0561508
947.996	538.604	0.0541992	0.0541992
948.046	538.554	0.0578461	0.0578461
948.096	538.504	0.0586786	0.0586786
948.146	538.454	0.0580335	0.0580335
948.196	538.404	0.0564981	0.0564981
948.246	538.354	0.0570053	0.0570053
948.296	538.304	0.0544666	0.0544666
948.346	538.254	0.0536534	0.0536534
948.396	538.204	0.0529505	0.0529505
948.446	538.154	0.0547477	0.0547477
948.496	538.104	0.050952	0.050952
948.546	538.054	0.0523082	0.0523082
948.596	538.004	0.0549324	0.0549324
948.646	537.954	0.0603683	0.0603683
948.696	537.904	0.0547257	0.0547257
948.746	537.854	0.0497804	0.0497804
948.796	537.804	0.0503125	0.0503125
948.846	537.754	0.0584911	0.0584911
948.896	537.704	0.0578351	0.0578351
948.946	537.654	0.0551502	0.0551502
948.996	537.604	0.0507563	0.0507563
949.046	537.554	0.0486971	0.0486971
949.096	537.504	0.0521841	0.0521841
949.146	537.454	0.0533088	0.0533088
949.196	537.404	0.0532675	0.0532675
949.246	537.354	0.0506653	0.0506653
949.296	537.304	0.0566966	0.0566966
949.346	537.254	0.0543949	0.0543949
949.396	537.204	0.0528347	0.0528347
949.446	537.154	0.053714	0.053714
949.496	537.104	0.0533281	0.0533281
949.546	537.054	0.0497639	0.0497639
949.596	537.004	0.0495186	0.0495186
949.646	536.954	0.0535845	0.0535845
949.696	536.904	0.0546678	0.0546678
949.746	536.854	0.0520794	0.0520794
949.796	536.804	0.0552632	0.0552632
949.846	536.754	0.0548442	0.0548442
949.896	536.704	0.0572589	0.0572589
949.946	536.654	0.0517403	0.0517403
949.996	536.604	0.0537967	0.0537967
950.046	536.554	0.0547753	0.0547753
950.096	536.504	0.0549049	0.0549049
950.146	536.454	0.0522283	0.0522283
950.196	536.404	0.0505964	0.0505964
950.246	536.354	0.0501691	0.0501691
950.296	536.304	0.0478812	0.0478812
950.346	536.254	0.0515998	0.0515998
950.396	536.204	0.0490803	0.0490803
950.446	536.154	0.0458	0.0458
950.496	536.104	0.0466104	0.0466104
950.546	536.054	0.0507756	0.0507756
950.596	536.004	0.0535597	0.0535597
950.646	535.954	0.0506377	0.0506377
950.696	535.904	0.0470432	0.0470432
950.746	535.854	0.0433908	0.0433908
950.796	535.804	0.0432281	0.0432281
950.846	535.754	0.0458579	0.0458579
950.896	535.704	0.0487826	0.0487826
950.946	535.654	0.0500947	0.0500947
950.996	535.604	0.0481127	0.0481127
951.046	535.554	0.0472499	0.0472499
951.096	535.504	0.0461115	0.0461115
951.146	535.454	0.0420676	0.0420676
951.196	535.404	0.0448738	0.0448738
951.246	535.354	0.0473188	0.0473188
951.296	535.304	0.0501443	0.0501443
951.346	535.254	0.0468116	0.0468116
951.396	535.204	0.0492732	0.0492732
951.446	535.154	0.0480797	0.0480797
951.496	535.104	0.0473354	0.0473354
951.546	535.054	0.0452239	0.0452239
951.596	535.004	0.0436609	0.0436609
951.646	534.954	0.0399203	0.0399203
951.696	534.904	0.0374945	0.0374945
951.746	534.854	0.0423267	0.0423267
951.796	534.804	0.0448021	0.0448021
951.846	534.754	0.0465884	0.0465884
951.896	534.704	0.0442839	0.0442839
951.946	534.654	0.0500644	0.0500644
951.996	534.604	0.0490196	0.0490196
952.046	534.554	0.0490637	0.0490637
952.096	534.504	0.0448187	0.0448187
952.146	534.454	0.0477241	0.0477241
952.196	534.404	0.0470597	0.0470597
952.246	534.354	0.0477296	0.0477296
952.296	534.304	0.0474043	0.0474043
952.346	534.254	0.0501912	0.0501912
952.396	534.204	0.0487605	0.0487605
952.446	534.154	0.0467097	0.0467097
952.496	534.104	0.0439393	0.0439393
952.546	534.054	0.0464395	0.0464395
952.596	534.004	0.04349	0.04349
952.646	533.954	0.0455243	0.0455243
952.696	533.904	0.0456015	0.0456015
952.746	533.854	0.0463926	0.0463926
952.796	533.804	0.0431758	0.0431758
952.846	533.754	0.0455795	0.0455795
952.896	533.704	0.0478288	0.0478288
952.946	533.654	0.0499128	0.0499128
952.996	533.604	0.0486751	0.0486751
953.046	533.554	0.0475559	0.0475559
953.096	533.504	0.0468061	0.0468061
953.146	533.454	0.048132	0.048132
953.196	533.404	0.047815	0.047815
953.246	533.354	0.0515722	0.0515722
953.296	533.304	0.0498383	0.0498383
953.346	533.254	0.0486833	0.0486833
953.396	533.204	0.0480962	0.0480962
953.446	533.154	0.0513572	0.0513572
953.496	533.104	0.0506295	0.0506295
953.546	533.054	0.0529201	0.0529201
953.596	533.004	0.0599631	0.0599631
953.646	532.954	0.0609059	0.0609059
953.696	532.904	0.0574023	0.0574023
953.746	532.854	0.053375	0.053375
953.796	532.804	0.0570053	0.0570053
953.846	532.754	0.0623475	0.0623475
953.896	532.704	0.0669179	0.0669179
953.946	532.654	0.0637065	0.0637065
953.996	532.604	0.0598694	0.0598694
954.046	532.554	0.0640786	0.0640786
954.096	532.504	0.0648505	0.0648505
954.146	532.454	0.0625763	0.0625763
954.196	532.404	0.065264	0.065264
954.246	532.354	0.0751103	0.0751103
954.296	532.304	0.0759759	0.0759759
954.346	532.254	0.071174	0.071174
954.396	532.204	0.0710637	0.0710637
954.446	532.154	0.0739719	0.0739719
954.496	532.104	0.082564	0.082564
954.546	532.054	0.0815662	0.0815662
954.596	532.004	0.0796366	0.0796366
954.646	531.954	0.0756368	0.0756368
954.696	531.904	0.0802237	0.0802237
954.746	531.854	0.0836915	0.0836915
954.796	531.804	0.0911314	0.0911314
954.846	531.754	0.0961841	0.0961841
954.896	531.704	0.0983728	0.0983728
954.946	531.654	0.101802	0.101802
954.996	531.604	0.104308	0.104308
955.046	531.554	0.106778	0.106778
955.096	531.504	0.110725	0.110725
955.146	531.454	0.116186	0.116186
955.196	531.404	0.126829	0.126829
955.246	531.354	0.132998	0.132998
955.296	531.304	0.13689	0.13689
955.346	531.254	0.139426	0.139426
955.396	531.204	0.142888	0.142888
955.446	531.154	0.150298	0.150298
955.496	531.104	0.160591	0.160591
955.546	531.054	0.178015	0.178015
955.596	531.004	0.190086	0.190086
955.646	530.954	0.210076	0.210076
955.696	530.904	0.222288	0.222288
955.746	530.854	0.23324	0.23324
955.796	530.804	0.252571	0.252571
955.846	530.754	0.282651	0.282651
955.896	530.704	0.311735	0.311735
955.946	530.654	0.341351	0.341351
955.996	530.604	0.378882	0.378882
956.046	530.554	0.416208	0.416208
956.096	530.504	0.451624	0.451624
956.146	530.454	0.487892	0.487892
956.196	530.404	0.527415	0.527415
956.246	530.354	0.575892	0.575892
956.296	530.304	0.634612	0.634612
956.346	530.254	0.680081	0.680081
956.396	530.204	0.724935	0.724935
956.446	530.154	0.760084	0.760084
956.496	530.104	0.80616	0.80616
956.546	530.054	0.854656	0.854656
956.596	530.004	0.898093	0.898093
956.646	529.954	0.934513	0.934513
956.696	529.904	0.957378	0.957378
956.746	529.854	0.985586	0.985586
956.796	529.804	1	1
956.846	529.754	0.996328	0.996328
956.896	529.704	0.978328	0.978328
956.946	529.654	0.959385	0.959385
956.996	529.604	0.946518	0.946518
957.046	529.554	0.911694	0.911694
957.096	529.504	0.871231	0.871231
957.146	529.454	0.816599	0.816599
957.196	529.404	0.761796	0.761796
957.246	529.354	0.707401	0.707401
957.296	529.304	0.656127	0.656127
957.346	529.254	0.594479	0.594479
957.396	529.204	0.528157	0.528157
957.446	529.154	0.474396	0.474396
957.496	529.104	0.435972	0.435972
957.546	529.054	0.387741	0.387741
957.596	529.004	0.328462	0.328462
957.646	528.954	0.271685	0.271685
957.696	528.904	0.234814	0.234814
957.746	528.854	0.206978	0.206978
957.796	528.804	0.186668	0.186668
957.846	528.754	0.154474	0.154474
957.896	528.704	0.12657	0.12657
957.946	528.654	0.103555	0.103555
957.996	528.604	0.0920465	0.0920465
958.046	528.554	0.0787876	0.0787876
958.096	528.504	0.0734619	0.0734619
958.146	528.454	0.0632682	0.0632682
958.196	528.404	0.0565092	0.0565092
958.246	528.354	0.0490555	0.0490555
958.296	528.304	0.0443528	0.0443528
958.346	528.254	0.0387736	0.0387736
958.396	528.204	0.0367806	0.0367806
958.446	528.154	0.0346911	0.0346911
958.496	528.104	0.0319456	0.0319456
958.546	528.054	0.0287811	0.0287811
958.596	528.004	0.0242962	0.0242962
958.646	527.954	0.0197892	0.0197892
958.696	527.904	0.0209222	0.0209222
958.746	527.854	0.0235602	0.0235602
958.796	527.804	0.0222729	0.0222729
958.846	527.754	0.0163959	0.0163959
958.896	527.704	0.0110041	0.0110041
958.946	527.654	0.00766871	0.00766871
958.996	527.604	0.0135457	0.0135457
959.046	527.554	0.0189705	0.0189705
959.096	527.504	0.0153512	0.0153512
959.146	527.454	0.0083165	0.0083165
959.196	527.404	0.00573637	0.00573637
959.246	527.354	0.00770179	0.00770179
959.296	527.304	0.00946046	0.00946046
959.346	527.254	0.0114149	0.0114149
959.396	527.204	0.0124265	0.0124265
959.446	527.154	0.0105741	0.0105741
959.496	527.104	0.0125202	0.0125202
959.546	527.054	0.00843503	0.00843503
959.596	527.004	0.0100007	0.0100007
959.646	526.954	0.0069713	0.0069713
959.696	526.904	0.0089064	0.0089064
959.746	526.854	0.00544693	0.00544693
959.796	526.804	0.00643102	0.00643102
959.846	526.754	0.00432226	0.00432226
959.896	526.704	0.00257461	0.00257461
959.946	526.654	0.00224383	0.00224383
959.996	526.604	0.00495075	0.00495075
960.046	526.554	0.00732965	0.00732965
960.096	526.504	0.00883473	0.00883473
960.146	526.454	0.00901941	0.00901941
960.196	526.404	0.00538078	0.00538078
960.246	526.354	0.00369653	0.00369653
960.296	526.304	0.00435534	0.00435534
960.346	526.254	0.00573637	0.00573637
960.396	526.204	0.00415136	0.00415136
960.446	526.154	0.00757498	0.00757498
960.496	526.104	0.0104004	0.0104004
960.546	526.054	0.00929507	0.00929507
960.596	526.004	0.00458689	0.00458689
960.646	525.954	0.00443804	0.00443804
960.696	525.904	0.00904698	0.00904698
960.746	525.854	0.00702919	0.00702919
960.796	525.804	0.00263526	0.00263526
960.846	525.754	0.000884851	0.000884851
960.896	525.704	0.0048846	0.0048846
960.946	525.654	0.00497281	0.00497281
960.996	525.604	0.00696303	0.00696303
961.046	525.554	0.00774589	0.00774589
961.096	525.504	0.00450971	0.00450971
961.146	525.454	0.00194061	0.00194061
961.196	525.404	0.00251121	0.00251121
961.246	525.354	0.00404109	0.00404109
961.296	525.304	0.00544142	0.00544142
961.346	525.254	0.00535321	0.00535321
961.396	525.204	0.00405763	0.00405763
961.446	525.154	0.00332164	0.00332164
961.496	525.104	0.00578323	0.00578323
961.546	525.054	0.00848189	0.00848189
961.596	525.004	0.00699611	0.00699611
961.646	524.954	0.00651096	0.00651096
961.696	524.904	0.00504172	0.00504172
961.746	524.854	0.00619396	0.00619396
961.796	524.804	0.00372961	0.00372961
961.846	524.754	0.00484325	0.00484325
961.896	524.704	0.00519333	0.00519333
961.946	524.654	0.00769352	0.00769352
961.996	524.604	0.00648064	0.00648064
962.046	524.554	0.00448214	0.00448214
962.096	524.504	0.00178073	0.00178073
962.146	524.454	0.0047578	0.0047578
962.196	524.404	0.00773211	0.00773211
962.246	524.354	0.00845984	0.00845984
962.296	524.304	0.00551585	0.00551585
962.346	524.254	0.00340158	0.00340158
962.396	524.204	0.00430572	0.00430572
962.446	524.154	0.0047192	0.0047192
962.496	524.104	0.00474677	0.00474677
962.546	524.054	0.0035394	0.0035394
962.596	524.004	0.00292194	0.00292194
962.646	523.954	0.00116326	0.00116326
962.696	523.904	0.00344292	0.00344292
962.746	523.854	0.00950457	0.00950457
962.796	523.804	0.0088044	0.0088044
962.846	523.754	0.00222729	0.00222729
962.896	523.704	0.00320862	0.00320862
962.946	523.654	0.00589901	0.00589901
962.996	523.604	0.00559303	0.00559303
963.046	523.554	0.00653577	0.00653577
963.096	523.504	0.0111668	0.0111668
963.146	523.454	0.00568675	0.00568675
963.196	523.404	0.000250846	0.000250846
963.246	523.354	0.00202055	0.00202055
963.296	523.304	0.0041679	0.0041679
963.346	523.254	0.0045924	0.0045924
963.396	523.204	0.00369653	0.00369653
963.446	523.154	0.00541661	0.00541661
963.496	523.104	0.0058549	0.0058549
963.546	523.054	0.00793885	0.00793885
963.596	523.004	0.00947424	0.00947424
963.646	522.954	0.00983535	0.00983535
963.696	522.904	0.00669289	0.00669289
963.746	522.854	0.00504448	0.00504448
963.796	522.804	0.00260493	0.00260493
963.846	522.754	0.0021887	0.0021887
963.896	522.704	0.000951008	0.000951008
963.946	522.654	0.00583561	0.00583561
963.996	522.604	0.0047578	0.0047578
964.046	522.554	0.00654404	0.00654404
964.096	522.504	0.0021501	0.0021501
964.146	522.454	0.00163463	0.00163463
964.196	522.404	0.0023789	0.0023789
964.246	522.354	0.00514647	0.00514647
964.296	522.304	0.00197093	0.00197093
964.346	522.254	0.00189926	0.00189926
964.396	522.204	0.00331061	0.00331061
964.446	522.154	0.00535597	0.00535597
964.496	522.104	0.00355594	0.00355594
964.546	522.054	0	0
964.596	522.004	0.00218043	0.00218043
964.646	521.954	0.00968374	0.00968374